Abubuwan gani a cikin injin lithography

Zane na gani yana da fa'idodin aikace-aikace a cikin filin semiconductor. A cikin na'ura mai daukar hoto, tsarin gani yana da alhakin mayar da hankali ga hasken hasken da ke fitowa daga hasken da kuma ƙaddamar da shi a kan wafer silicon don fallasa tsarin kewaye. Saboda haka, ƙira da haɓaka kayan aikin gani a cikin tsarin hoto shine hanya mai mahimmanci don inganta aikin na'urar daukar hoto. Wadannan su ne wasu daga cikin abubuwan da ake amfani da su a cikin injin daukar hoto:

Hasashen hasashe
01 Makasudin tsinkaya shine maɓalli na gani a cikin injin lithography, yawanci yana ƙunshe da jerin ruwan tabarau da suka haɗa da ruwan tabarau mai ma'ana, ruwan tabarau mai ma'ana, da prisms.
02 Ayyukansa shine ƙunshe tsarin kewayawa akan abin rufe fuska kuma mayar da hankali kan wafer ɗin da aka lulluɓe da photoresisist.
03 Daidaituwa da aiwatar da manufar hasashen suna da tasiri mai tasiri akan ƙuduri da ingancin hoto na injin lithography.

madubi
01 Madubaiana amfani da su don canza alkiblar haske da kuma kai shi wurin da ya dace.
02 A cikin injunan lithography na EUV, madubai suna da mahimmanci musamman saboda hasken EUV yana ɗauka cikin sauƙi ta kayan, don haka dole ne a yi amfani da madubai tare da babban haske.
03 Daidaitaccen daidaito da kwanciyar hankali na mai haskakawa shima yana da tasiri mai girma akan aikin injin lithography.

Tace
01 Ana amfani da matattara don cire tsawon raƙuman haske maras so, haɓaka daidaito da ingancin aikin hoto.
02 Ta hanyar zaɓar matatun da ya dace, ana iya tabbatar da cewa kawai haske na takamaiman tsayin raƙuman ruwa ya shiga cikin injin lithography, ta haka inganta daidaito da kwanciyar hankali na tsarin lithography.

Prisms da sauran abubuwa
Bugu da kari, injin lithography na iya amfani da wasu kayan aikin gani na taimako, kamar prisms, polarizers, da sauransu, don biyan takamaiman buƙatun lithography. Zaɓin, ƙira da ƙera waɗannan kayan aikin gani dole ne su bi ƙa'idodin fasaha masu dacewa da buƙatu don tabbatar da daidaito da ingancin injin lithography.

A taƙaice, aikace-aikacen kayan aikin gani a fagen injunan lithography suna da nufin haɓaka aiki da samar da ingantattun injunan lithography, don haka suna tallafawa haɓaka masana'antar masana'antar microelectronics. Tare da ci gaba da haɓaka fasahar lithography, haɓakawa da haɓaka kayan aikin gani kuma za su ba da babbar dama don kera kwakwalwan kwamfuta na gaba.

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